Systematic layout planning: A study on semiconductor wafer fabrication facilities

Taho Yang, Chao Ton Su, Yuan Ru Hsu

研究成果: Article同行評審

90 引文 斯高帕斯(Scopus)

摘要

This paper proposes to use Muther's systematic layout planning procedure as the infrastructure to solve a fab layout design problem. A multiple objective decision making tool, analytic hierarchy process, is then proposed to evaluate the design alternatives. The proposed procedure is illustrated to be a viable approach for solving a fab layout design problem through a real-world case study. It features both the simplicity of the design process and the objectivity of the multiple-criteria evaluation process as opposed to existing solution methodologies.

原文English
頁(從 - 到)1359-1371
頁數13
期刊International Journal of Operations and Production Management
20
發行號11
DOIs
出版狀態Published - 2000 十二月 1

All Science Journal Classification (ASJC) codes

  • 決策科學 (全部)
  • 策略與管理
  • 技術與創新管理

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