Temperature dependent thermal conductivity of symmetrically strained Si/Ge superlattices

Theodorian Borca-Tasciuc, Jianlin Liu, Taofang Zeng, Weili Liu, David W. Song, Caroline D. Moore, Gang Chen, Kang L. Wang, Mark S. Goorsky, Tamara Radetic, Ronald Gronsky

研究成果: Conference contribution

2 引文 斯高帕斯(Scopus)

摘要

Experimental evidence for a significant thermal conductivity reduction has been reported in recent years for GaAs/AlAs, Si/Ge, and Bi2Te3/Sb2Te3 superlattices. Previously reported experimental studies on Si/Ge superlattices are based on samples grown by metal oxide chemical vapor deposition (MOCVD) on GaAs substrates with Ge buffers. In this work, we present experimental results on the temperature dependent thermal conductivity of symmetrically strained Si/Ge superlattices grown by molecular beam epitaxy (MBE) as a function of the superlattice period and the growth temperature. Thermal conductivity measurements are performed using a differential 3ω method. In this technique, the temperature drop across the superlattice film is experimentally determined and used to estimate the thermal conductivity of the film. Transmission electron microscopy (TEM) is employed to study the quality of the superlattice and the influence of the growth temperature on the superlattice structure. For all the superlattices studied, the measured thermal conductivity values are lower than that of the Si0.5Ge0.5 alloy. Furthermore, the measured thermal conductivity of a 40 angstrom period Si/Ge superlattice with high dislocation density is comparable to the calculated minimum thermal conductivity of the constituent bulk materials.

原文English
主出版物標題American Society of Mechanical Engineers, Heat Transfer Division, (Publication) HTD
發行者ASME
頁面117-122
頁數6
ISBN(列印)0791816567
出版狀態Published - 1999
事件Heat Transfer Division - 1999 ((The ASME International Mechanical Engineering Congress and Exposition) - Nashville, TN, USA
持續時間: 1999 十一月 141999 十一月 19

出版系列

名字American Society of Mechanical Engineers, Heat Transfer Division, (Publication) HTD
364-3
ISSN(列印)0272-5673

Conference

ConferenceHeat Transfer Division - 1999 ((The ASME International Mechanical Engineering Congress and Exposition)
城市Nashville, TN, USA
期間99-11-1499-11-19

All Science Journal Classification (ASJC) codes

  • 機械工業
  • 流體流動和轉移過程

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