Temperature-insensitive fiber pressure sensor based on fabry-pérot interferometry

Chih Wei Lai, Yu-Lung Lo, Jiahn Piring Yur

研究成果: Conference contribution

摘要

This paper presents the fiber pressure sensor with temperature-insensitive based on the principle of Fabry-Pérot interferometry. The design and fabrication of the sensor are based on MEMS technique and only needs a few of simple procedures. The pressure sensing membrane consists of a base polyimide layer, a metal reflective layer, and a SU-8 layer covered on the metal layer. Also, the fiber end facet is coated another SU-8 layer for temperature compensation. The analysis on the thicknesses of temperature compensator and pressure membrane is analyzed by FEM model. This pressure sensor exhibits an approximately linear response to applied pressure ranging from 0 to 60 kPa under the temperature difference about 100°C The simple fabrication, small size, linear response, and temperature-insensitive make the sensor suitable for many industrial applications.

原文English
主出版物標題Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009
頁面1331-1336
頁數6
出版狀態Published - 2009 十二月 1
事件SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009 - Albuquerque, NM, United States
持續時間: 2009 六月 12009 六月 4

出版系列

名字Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009
2

Other

OtherSEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009
國家/地區United States
城市Albuquerque, NM
期間09-06-0109-06-04

All Science Journal Classification (ASJC) codes

  • 計算力學

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