The deposition rate, hardness and tribological properties of a-C:H coatings with a tungsten filament-assisted ionized reaction gas

W. H. Kao, Yean-Liang Su, J. H. Horng, H. C. Huang

研究成果: Conference contribution

摘要

The a-C:H coatings were deposited on AISI M2 steel disks using an unbalanced magnetron sputtering technique with a single titanium metal target, three graphite targets and mixed methane/ acetylene reactive gas. The various currents (9A-17A) were applied to the tungsten filament to enhance ionization rate of reactive gas. Tribological properties of a-C:H coatings were conducted used reciprocating friction tester. The results show that the tungsten filament current has a significant effect on the deposition rate, hardness and tribological properties of the coatings. With the increase of the tungsten filament current, the deposition rate and hardness of the coating increases, respectively. In sliding against an AISI 52100 steel ball for 24 minutes, all of coatings reduce the wear depth by a factor of at least 11 compared to that observed on an uncoated substrate. The 17A coating yields the best tribological properties that are the minimum wear depth, the lowest friction coefficient and the maximum lifetime when sliding against an AISI 52100 steel ball.

原文English
主出版物標題Tribology Engineering
編輯Jeng-Haur Horng, Chin-Chung Wei, Yunn-Lin Hwang
發行者Trans Tech Publications Ltd
頁面135-140
頁數6
ISBN(電子)9783038354581
DOIs
出版狀態Published - 2015 一月 1
事件International Conference on Engineering Tribology Technology, ICETT 2014 - Nantou, Taiwan
持續時間: 2014 十一月 212014 十一月 23

出版系列

名字Key Engineering Materials
642
ISSN(列印)1013-9826

Other

OtherInternational Conference on Engineering Tribology Technology, ICETT 2014
國家Taiwan
城市Nantou
期間14-11-2114-11-23

指紋

Tungsten
Deposition rates
Gases
Hardness
Coatings
Steel
Wear of materials
Friction
Acetylene
Graphite
Methane
Titanium
Magnetron sputtering
Ionization
Metals
Substrates

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

引用此文

Kao, W. H., Su, Y-L., Horng, J. H., & Huang, H. C. (2015). The deposition rate, hardness and tribological properties of a-C:H coatings with a tungsten filament-assisted ionized reaction gas. 於 J-H. Horng, C-C. Wei, & Y-L. Hwang (編輯), Tribology Engineering (頁 135-140). (Key Engineering Materials; 卷 642). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/KEM.642.135
Kao, W. H. ; Su, Yean-Liang ; Horng, J. H. ; Huang, H. C. / The deposition rate, hardness and tribological properties of a-C:H coatings with a tungsten filament-assisted ionized reaction gas. Tribology Engineering. 編輯 / Jeng-Haur Horng ; Chin-Chung Wei ; Yunn-Lin Hwang. Trans Tech Publications Ltd, 2015. 頁 135-140 (Key Engineering Materials).
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Kao, WH, Su, Y-L, Horng, JH & Huang, HC 2015, The deposition rate, hardness and tribological properties of a-C:H coatings with a tungsten filament-assisted ionized reaction gas. 於 J-H Horng, C-C Wei & Y-L Hwang (編輯), Tribology Engineering. Key Engineering Materials, 卷 642, Trans Tech Publications Ltd, 頁 135-140, International Conference on Engineering Tribology Technology, ICETT 2014, Nantou, Taiwan, 14-11-21. https://doi.org/10.4028/www.scientific.net/KEM.642.135

The deposition rate, hardness and tribological properties of a-C:H coatings with a tungsten filament-assisted ionized reaction gas. / Kao, W. H.; Su, Yean-Liang; Horng, J. H.; Huang, H. C.

Tribology Engineering. 編輯 / Jeng-Haur Horng; Chin-Chung Wei; Yunn-Lin Hwang. Trans Tech Publications Ltd, 2015. p. 135-140 (Key Engineering Materials; 卷 642).

研究成果: Conference contribution

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N2 - The a-C:H coatings were deposited on AISI M2 steel disks using an unbalanced magnetron sputtering technique with a single titanium metal target, three graphite targets and mixed methane/ acetylene reactive gas. The various currents (9A-17A) were applied to the tungsten filament to enhance ionization rate of reactive gas. Tribological properties of a-C:H coatings were conducted used reciprocating friction tester. The results show that the tungsten filament current has a significant effect on the deposition rate, hardness and tribological properties of the coatings. With the increase of the tungsten filament current, the deposition rate and hardness of the coating increases, respectively. In sliding against an AISI 52100 steel ball for 24 minutes, all of coatings reduce the wear depth by a factor of at least 11 compared to that observed on an uncoated substrate. The 17A coating yields the best tribological properties that are the minimum wear depth, the lowest friction coefficient and the maximum lifetime when sliding against an AISI 52100 steel ball.

AB - The a-C:H coatings were deposited on AISI M2 steel disks using an unbalanced magnetron sputtering technique with a single titanium metal target, three graphite targets and mixed methane/ acetylene reactive gas. The various currents (9A-17A) were applied to the tungsten filament to enhance ionization rate of reactive gas. Tribological properties of a-C:H coatings were conducted used reciprocating friction tester. The results show that the tungsten filament current has a significant effect on the deposition rate, hardness and tribological properties of the coatings. With the increase of the tungsten filament current, the deposition rate and hardness of the coating increases, respectively. In sliding against an AISI 52100 steel ball for 24 minutes, all of coatings reduce the wear depth by a factor of at least 11 compared to that observed on an uncoated substrate. The 17A coating yields the best tribological properties that are the minimum wear depth, the lowest friction coefficient and the maximum lifetime when sliding against an AISI 52100 steel ball.

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Kao WH, Su Y-L, Horng JH, Huang HC. The deposition rate, hardness and tribological properties of a-C:H coatings with a tungsten filament-assisted ionized reaction gas. 於 Horng J-H, Wei C-C, Hwang Y-L, 編輯, Tribology Engineering. Trans Tech Publications Ltd. 2015. p. 135-140. (Key Engineering Materials). https://doi.org/10.4028/www.scientific.net/KEM.642.135