The development of A 3-dimensional vibration measuring system with corner cubes and quadrant detectors (Invited)

Shang Liang Chen, Wen Yuh Jywe, Tung Hsien Hsieh, Chien Hung Liu, Hsueh Liang Huang, Tung Hui Hsu, Yeau Ren Jeng, Ming Shi Wang

研究成果: Article同行評審

2 引文 斯高帕斯(Scopus)

摘要

In this paper, a new optical 3-dimensional vibrometer is presented. This system is composed of two orthogonally set up corner cubes (CC), a collimated laser source, two quadrant detectors (QD) and three beam-splitters (BS). The corner cubes are designed to be fixed to the vibrating object and reflect the laser source onto the quadrant detectors. Due to the optical characteristics of the corner cubes, the measuring results of the QD can be magnified twice and it is not affected by micrometer-angle. So, the three-dimensional vibration amplitude can be obtained. The resolution is about 50 nm. This system is characterized by three-dimensional measurement, high resolution, low cost, simple set up and wide bandwidth.

All Science Journal Classification (ASJC) codes

  • 一般工程

指紋

深入研究「The development of A 3-dimensional vibration measuring system with corner cubes and quadrant detectors (Invited)」主題。共同形成了獨特的指紋。

引用此