The development of low-temperature atomic layer deposition of hfo2 for tem sample preparation on soft photo-resist substrate

Kang Ping Peng, Ya Chi Liu, I. Feng Lin, Chih Chien Lin, Shu Wei Huang, Chao Cheng Ting

研究成果: Conference contribution

2 引文 斯高帕斯(Scopus)

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Engineering & Materials Science