The effect of oxygen content on bonding configuration and properties of low-k organosilicate glass dielectric film

Sheng Wen Chen, Chuan Pu Liu, Shiu Ko JangJian, Ying Lang Wang

研究成果: Article同行評審

6 引文 斯高帕斯(Scopus)

指紋

深入研究「The effect of oxygen content on bonding configuration and properties of low-k organosilicate glass dielectric film」主題。共同形成了獨特的指紋。

Engineering & Materials Science

Chemical Compounds

Physics & Astronomy