The effect of sol-gel composition ratio on phase transformation of titanium dioxide under CO2 laser annealing

S. L. Lin, H. Y. Wang, C. K. Chung, S. F. Chuang

研究成果: Conference contribution

1 引文 斯高帕斯(Scopus)

摘要

The sol-gel solution was mixed by tetraisopropyl orthotitanate (TTIP), acetonylacetone, distilled water and alcohol at various molar ratios and coated on p-type silicon substructure for titanium oxide formation. Then the CO 2 laser annealing in air at powers of 0.5, 1.5 and 3.0 W in the defocus mode was performed on the coatings for studying crystallization of titanium oxide. The microstructure and phase transformation of titanium dioxide were examined by X-ray diffraction pattern. Increasing TTIP concentration and decreasing laser power were favorable for anatase phase formation. The grain size of titanium dioxide calculated using Scherrer's formula was between 10 and 32 nm, which increased with increasing laser power. The ANSYS simulation was employed to calculate temperature distribution of films to correlate with phase transformation of titanium dioxide. This sol-gel processing combined with CO2 laser annealing had advantages of low cost, controllable titanium dioxide phase, selective area annealing, large area fabrication and easy operating at room temperature.

原文English
主出版物標題NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
頁面1100-1103
頁數4
DOIs
出版狀態Published - 2011 十月 4
事件6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011 - Kaohsiung, Taiwan
持續時間: 2011 二月 202011 二月 23

出版系列

名字NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Other

Other6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011
國家Taiwan
城市Kaohsiung
期間11-02-2011-02-23

    指紋

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics

引用此

Lin, S. L., Wang, H. Y., Chung, C. K., & Chuang, S. F. (2011). The effect of sol-gel composition ratio on phase transformation of titanium dioxide under CO2 laser annealing. 於 NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (頁 1100-1103). [6017548] (NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems). https://doi.org/10.1109/NEMS.2011.6017548