TY - JOUR
T1 - The effects of ZnO films on surface acoustic wave properties of modified lead titanate ceramic substrates
AU - Chu, Sheng Yuan
AU - Chen, Te Yi
AU - Water, W.
N1 - Funding Information:
Manuscript received May 31, 2004; accepted April 19, 2005. The National Science Council of the Republic of China supported this research, under Grant No. NSC93-2216-E-006-033. The authors also acknowledge support from the Center for Micro-Nano Technology, National Cheng Kung University.
PY - 2005/12
Y1 - 2005/12
N2 - Poly-crystal zinc oxide (ZnO) films with c-axis [002] orientation have been successfully grown on the strontium (Sr) modified lead titanate ceramic substrates with different Sr dopants by r.f. magnetron sputtering technique. Highly oriented ZnO films with c-axis normal to the substrates can be obtained under a total pressure of 10 mTorr containing 50% argon and 50% oxygen and r.f. power of 70 W for 3 hours. Crystalline structures of the films were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM) and atomic force microscopy (AFM). The phase velocity, electromechanical coupling coefficient arid temperature coefficient of frequency of surface acoustic wave (SAW) devices with ZnO/IDT/PT (IDT, inter-digital transducer; PT, PbTiO/sub 3/ ceramics) structure were investigated. The devices with ZnO/IDT/PT structure shows that the ZnO film effectively raise the electromechanical coupling coefficient (k/sup 2/) from 3.8% to 9.9% of the device with the concentrations of Sr dopants of 0.15. It also improves the temperature coefficient of frequency of SAW devices.
AB - Poly-crystal zinc oxide (ZnO) films with c-axis [002] orientation have been successfully grown on the strontium (Sr) modified lead titanate ceramic substrates with different Sr dopants by r.f. magnetron sputtering technique. Highly oriented ZnO films with c-axis normal to the substrates can be obtained under a total pressure of 10 mTorr containing 50% argon and 50% oxygen and r.f. power of 70 W for 3 hours. Crystalline structures of the films were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM) and atomic force microscopy (AFM). The phase velocity, electromechanical coupling coefficient arid temperature coefficient of frequency of surface acoustic wave (SAW) devices with ZnO/IDT/PT (IDT, inter-digital transducer; PT, PbTiO/sub 3/ ceramics) structure were investigated. The devices with ZnO/IDT/PT structure shows that the ZnO film effectively raise the electromechanical coupling coefficient (k/sup 2/) from 3.8% to 9.9% of the device with the concentrations of Sr dopants of 0.15. It also improves the temperature coefficient of frequency of SAW devices.
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U2 - 10.1109/TUFFC.2005.1563275
DO - 10.1109/TUFFC.2005.1563275
M3 - Article
C2 - 16463498
AN - SCOPUS:32844469621
SN - 0885-3010
VL - 52
SP - 2308
EP - 2313
JO - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
JF - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
IS - 12
ER -