The influence of Mg doped ZnO thin films on the properties of Love wave sensors

Ren Chuan Chang, Sheng Yuan Chu, Po Wen Yeh, Cheng Shong Hong, Po Ching Kao, Yi Jen Huang

研究成果: Article同行評審

28 引文 斯高帕斯(Scopus)

摘要

The influence of Mg dopants on the crystalline structures of MZO thin films and the properties of Love wave sensors has been studied in this paper. 0-20 mol% Mg doped ZnO films with c-axis preferred orientation were deposited on the 64° YX-LiNbO3 substrates by RF magnetron sputtering technique. XRD, SEM, and AFM measurements investigated characteristics of the films. The phase shift and temperature coefficient of frequency of Love wave devices in MZO/LiNbO3 structures are presented. The appropriate addition of Mg dopant will produce a rough surface to raise the sensitivity. Besides, the effects of reflector gratings on the properties of Love wave sensors are also investigated.

原文English
頁(從 - 到)290-295
頁數6
期刊Sensors and Actuators, B: Chemical
132
發行號1
DOIs
出版狀態Published - 2008 五月 28

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 儀器
  • 凝聚態物理學
  • 表面、塗料和薄膜
  • 金屬和合金
  • 電氣與電子工程
  • 材料化學

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