The influence of Mg dopants on the crystalline structures of MZO thin films and the properties of Love wave sensors has been studied in this paper. 0-20 mol% Mg doped ZnO films with c-axis preferred orientation were deposited on the 64° YX-LiNbO3 substrates by RF magnetron sputtering technique. XRD, SEM, and AFM measurements investigated characteristics of the films. The phase shift and temperature coefficient of frequency of Love wave devices in MZO/LiNbO3 structures are presented. The appropriate addition of Mg dopant will produce a rough surface to raise the sensitivity. Besides, the effects of reflector gratings on the properties of Love wave sensors are also investigated.
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