The influence of oxygen content in the sputtering gas on the self-synthesis of tungsten oxide nanowires on sputter-deposited tungsten films

Chao Hsuing Chen, Shui Jinn Wang, Rong Ming Ko, Yi Cheng Kuo, Kai Ming Uang, Tron Min Chen, Bor Wen Liou, Hao Yi Tsai

研究成果: Article

37 引文 (Scopus)

摘要

The self-synthesis of tungsten oxide (W18O49) nanowires on sputter-deposited W films prepared under different O 2/Ar flow rate ratios (OAFRRs) in the sputtering gas is reported. After thermally annealing at 700-850 °C in N2 ambient for 15 min, dense and well crystalline W18O49 (010) nanowires or nanobelts were obtained depending on the oxygen content in the sputtering gas. Experimental results show that the annealing temperature required for the full growth of W18O49 nanowires reduced when the OAFRR in the sputtering gas was increased. It is found that the oxygen absorbed in the surface region is responsible for the growth of nanowires. As the OAFRR was increased to (8 sccm)/(24 sccm), which resulted in a saturated oxygen content of about 55 at.% inside the W film, large-scale nanobelts or nanosheets of W18O49 were grown. The possible growth mechanism which governs the evolution from nanowires to nanobelts as the OAFRR was changed is also discussed.

原文English
頁(從 - 到)217-223
頁數7
期刊Nanotechnology
17
發行號1
DOIs
出版狀態Published - 2006 一月 14

指紋

Tungsten
Nanowires
Sputtering
Nanobelts
Gases
Oxygen
Oxides
Flow rate
Annealing
Nanosheets
tungsten oxide
Crystalline materials
Temperature

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

引用此文

Chen, Chao Hsuing ; Wang, Shui Jinn ; Ko, Rong Ming ; Kuo, Yi Cheng ; Uang, Kai Ming ; Chen, Tron Min ; Liou, Bor Wen ; Tsai, Hao Yi. / The influence of oxygen content in the sputtering gas on the self-synthesis of tungsten oxide nanowires on sputter-deposited tungsten films. 於: Nanotechnology. 2006 ; 卷 17, 編號 1. 頁 217-223.
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The influence of oxygen content in the sputtering gas on the self-synthesis of tungsten oxide nanowires on sputter-deposited tungsten films. / Chen, Chao Hsuing; Wang, Shui Jinn; Ko, Rong Ming; Kuo, Yi Cheng; Uang, Kai Ming; Chen, Tron Min; Liou, Bor Wen; Tsai, Hao Yi.

於: Nanotechnology, 卷 17, 編號 1, 14.01.2006, p. 217-223.

研究成果: Article

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AU - Kuo, Yi Cheng

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AU - Chen, Tron Min

AU - Liou, Bor Wen

AU - Tsai, Hao Yi

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