The influences of plasma ion bombarded on crystallization, electrical and mechanical properties of Zn-In-Sn-O films

K. J. Chen, F. Y. Hung, S. J. Chang, J. D. Liao, C. C. Weng, Z. S. Hu

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3 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Physics & Astronomy

Chemical Compounds