The Investigation of Gate-Stacked In-Ga-Zn-O TFTs with Ga-Zn-O Source/Drain Electrodes by Atmospheric Pressure Plasma-Enhanced Chemical Vapor Deposition

Chien Hung Wu; Kow-Ming Chang; Yi-Ming Chen; Bo Wen Huang; Yu Xin Zhang; Shui-Jinn Wang; Jui-Mei Hsu

The Investigation of Gate-Stacked In-Ga-Zn-O TFTs with Ga-Zn-O Source/Drain Electrodes by Atmospheric Pressure Plasma-Enhanced Chemical Vapor Deposition

Chien Hung Wu
, Kow-Ming Chang
, Yi-Ming Chen
, Bo Wen Huang
, Yu Xin Zhang
, Shui-Jinn Wang
, Jui-Mei Hsu

微電子工程研究所

研究成果: Conference contribution

原文	English
主出版物標題	The 14th International Conference on Nano Science and Nano Technology
出版地	Mokpo, Korea
出版狀態	Published - 2016 11月 10

引用此

@inproceedings{55465d4586c64156b9e6776979858af2,

title = "The Investigation of Gate-Stacked In-Ga-Zn-O TFTs with Ga-Zn-O Source/Drain Electrodes by Atmospheric Pressure Plasma-Enhanced Chemical Vapor Deposition",

author = "Wu, \{Chien Hung\} and Kow-Ming Chang and Yi-Ming Chen and Huang, \{Bo Wen\} and Zhang, \{Yu Xin\} and Shui-Jinn Wang and Jui-Mei Hsu",

year = "2016",

month = nov,

day = "10",

language = "English",

booktitle = "The 14th International Conference on Nano Science and Nano Technology",

}

TY - GEN

T1 - The Investigation of Gate-Stacked In-Ga-Zn-O TFTs with Ga-Zn-O Source/Drain Electrodes by Atmospheric Pressure Plasma-Enhanced Chemical Vapor Deposition

AU - Wu, Chien Hung

AU - Chang, Kow-Ming

AU - Chen, Yi-Ming

AU - Huang, Bo Wen

AU - Zhang, Yu Xin

AU - Wang, Shui-Jinn

AU - Hsu, Jui-Mei

PY - 2016/11/10

Y1 - 2016/11/10

M3 - Conference contribution

BT - The 14th International Conference on Nano Science and Nano Technology

CY - Mokpo, Korea

ER -