The investigation of preferred orientation growth of ZnO films on the PbTiO3-based ceramics and its application for SAW devices

Sheng Yuan Chu, Te Yi Chen, Walter Water

研究成果: Article同行評審

29 引文 斯高帕斯(Scopus)

摘要

Poly-crystal ZnO films with c-axis (0 0 2) orientation have been successfully grown on the lead-based ceramic substrates by RF magnetron sputtering technique. The deposited films were characterized as a function of deposition time, argon-oxygen gas flow ratio, and RF power. Crystalline structures of the films were investigated by X-ray diffraction, scanning electron microscopy and atomic force microscopy. Highly oriented films with c-axis normal to the substrates can be obtained by depositing under a total pressure of 10mTorr containing 50% argon and 50% oxygen and RF power of 70W for 3h. The phase velocity, electromechanical coupling coefficient and temperature coefficient of frequency of surface acoustic wave (SAW) device with ZnO/IDT/PT-ceramic structure were investigated. It shows that the preferred oriented ZnO film is beneficial for improving the electromechanical coupling coefficient of SAW device.

原文English
頁(從 - 到)280-285
頁數6
期刊Journal of Crystal Growth
257
發行號3-4
DOIs
出版狀態Published - 2003 十月 1

All Science Journal Classification (ASJC) codes

  • 凝聚態物理學
  • 無機化學
  • 材料化學

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