The Investigation of Preferred Orientation Growth of ZnO Films on the Ceramic Substrates

Sheng-Yuan Chu, Te Yi Chen, Walter Water, Tung Yi Huang

研究成果: Conference article

摘要

Poly-crystal ZnO films with c-axis (002) orientation have been successfully grown on the lead-based ceramic substrates by r.f. magnetron sputtering technique. The deposited films were characterized as a function of deposition time and argon-oxygen gas flow ratio. Crystalline structures of the films were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM) and atomic force microscopy (AFM). Highly oriented films with c-axis normal to the substrates can be obtained by depositing under a total pressure of 10mTorr containing 50% argon and 50% oxygen and r.f. power of 70W for 3 hours. The phase velocity, electromechanical coupling coefficient and temperature coefficient of frequency of SAW device with ZnO/IDT/PT-ceramic structure were investigated. It shows that the preferred oriented ZnO film is beneficial for improving the electromechanical coupling coefficient of SAW device.

原文English
頁(從 - 到)95-110
頁數16
期刊Materials Research Society Symposium - Proceedings
764
出版狀態Published - 2003 十二月 8
事件MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS: New Applications for Wide-Bandgap Semiconductors - San Francisco, CA, United States
持續時間: 2003 四月 222003 四月 24

指紋

ceramics
Substrates
Electromechanical coupling
Argon
coupling coefficients
argon
Oxygen
Phase velocity
oxygen
phase velocity
Crystal orientation
Magnetron sputtering
gas flow
Flow of gases
Atomic force microscopy
magnetron sputtering
Lead
atomic force microscopy
Crystalline materials
X ray diffraction

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

引用此文

@article{4742f5f4cb2545fa8e621833c1956f3b,
title = "The Investigation of Preferred Orientation Growth of ZnO Films on the Ceramic Substrates",
abstract = "Poly-crystal ZnO films with c-axis (002) orientation have been successfully grown on the lead-based ceramic substrates by r.f. magnetron sputtering technique. The deposited films were characterized as a function of deposition time and argon-oxygen gas flow ratio. Crystalline structures of the films were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM) and atomic force microscopy (AFM). Highly oriented films with c-axis normal to the substrates can be obtained by depositing under a total pressure of 10mTorr containing 50{\%} argon and 50{\%} oxygen and r.f. power of 70W for 3 hours. The phase velocity, electromechanical coupling coefficient and temperature coefficient of frequency of SAW device with ZnO/IDT/PT-ceramic structure were investigated. It shows that the preferred oriented ZnO film is beneficial for improving the electromechanical coupling coefficient of SAW device.",
author = "Sheng-Yuan Chu and Chen, {Te Yi} and Walter Water and Huang, {Tung Yi}",
year = "2003",
month = "12",
day = "8",
language = "English",
volume = "764",
pages = "95--110",
journal = "Materials Research Society Symposium - Proceedings",
issn = "0272-9172",
publisher = "Materials Research Society",

}

The Investigation of Preferred Orientation Growth of ZnO Films on the Ceramic Substrates. / Chu, Sheng-Yuan; Chen, Te Yi; Water, Walter; Huang, Tung Yi.

於: Materials Research Society Symposium - Proceedings, 卷 764, 08.12.2003, p. 95-110.

研究成果: Conference article

TY - JOUR

T1 - The Investigation of Preferred Orientation Growth of ZnO Films on the Ceramic Substrates

AU - Chu, Sheng-Yuan

AU - Chen, Te Yi

AU - Water, Walter

AU - Huang, Tung Yi

PY - 2003/12/8

Y1 - 2003/12/8

N2 - Poly-crystal ZnO films with c-axis (002) orientation have been successfully grown on the lead-based ceramic substrates by r.f. magnetron sputtering technique. The deposited films were characterized as a function of deposition time and argon-oxygen gas flow ratio. Crystalline structures of the films were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM) and atomic force microscopy (AFM). Highly oriented films with c-axis normal to the substrates can be obtained by depositing under a total pressure of 10mTorr containing 50% argon and 50% oxygen and r.f. power of 70W for 3 hours. The phase velocity, electromechanical coupling coefficient and temperature coefficient of frequency of SAW device with ZnO/IDT/PT-ceramic structure were investigated. It shows that the preferred oriented ZnO film is beneficial for improving the electromechanical coupling coefficient of SAW device.

AB - Poly-crystal ZnO films with c-axis (002) orientation have been successfully grown on the lead-based ceramic substrates by r.f. magnetron sputtering technique. The deposited films were characterized as a function of deposition time and argon-oxygen gas flow ratio. Crystalline structures of the films were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM) and atomic force microscopy (AFM). Highly oriented films with c-axis normal to the substrates can be obtained by depositing under a total pressure of 10mTorr containing 50% argon and 50% oxygen and r.f. power of 70W for 3 hours. The phase velocity, electromechanical coupling coefficient and temperature coefficient of frequency of SAW device with ZnO/IDT/PT-ceramic structure were investigated. It shows that the preferred oriented ZnO film is beneficial for improving the electromechanical coupling coefficient of SAW device.

UR - http://www.scopus.com/inward/record.url?scp=0344927864&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0344927864&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0344927864

VL - 764

SP - 95

EP - 110

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

SN - 0272-9172

ER -