The model developed for stress-induced structural phase transformations of micro-crystalline silicon films

Chang Fu Han, Jen Fin Lin

研究成果: Article同行評審

5 引文 斯高帕斯(Scopus)

摘要

The nanoindentations were applied to island-shaped regions with metal-induced Si crystallizations. The experimental stress-strain relationship is obtained from the load-depth profile in order to investigate the critical stresses arising at various phase transitions. The stress and strain values at various indentation depths are applied to determine the Gibbs free energy at various phases. The intersections of the Gibbs free energy lines are used to determine the possible paths of phase transitions arising at various indentation depths. All the critical contact stresses corresponding to the various phase transitions at four annealing temperatures were found to be consistent with the experimental results.

原文English
頁(從 - 到)68-73
頁數6
期刊Nano-Micro Letters
2
發行號2
DOIs
出版狀態Published - 2010

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 表面、塗料和薄膜
  • 電氣與電子工程

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