The Performance Improvement of LaAlO3/ZrO2/IGZO-TFTs with AP-PECVD by KrF Excimer Laser Annealing

Chien Hung Wu, Bo Wen Huang, Kow Ming Chang, Shui-Jinn Wang

研究成果: Conference contribution

原文English
主出版物標題The 28th International Microprocesses and Nanotechnology Conference
出版地Toyama, Japan
出版狀態Published - 2015 十一月 10

引用此

Wu, C. H., Huang, B. W., Chang, K. M., & Wang, S-J. (2015). The Performance Improvement of LaAlO3/ZrO2/IGZO-TFTs with AP-PECVD by KrF Excimer Laser Annealing. 於 The 28th International Microprocesses and Nanotechnology Conference