The Prandtl micro flow sensor (PMFS): A novel silicon diaphragm capacitive sensor for flow-velocity measurement

Engineering & Materials Science

• Capacitive sensors 100%
• Capacitors 10%
• Computational fluid dynamics 9%
• Diaphragms 85%
• Electrodes 10%
• Experiments 4%
• Flow measurement 90%
• Flow velocity 80%
• Fluids 16%
• Sensors 40%
• Silicon 61%
• Velocity measurement 80%
• Wind tunnels 11%

Physics & Astronomy

• capacitors 11%
• charge flow devices 14%
• counters 11%
• deflection 11%
• diaphragms 88%
• electrodes 8%
• fabrication 7%
• flow velocity 62%
• fluid pressure 17%
• fluids 7%
• sensors 47%
• silicon 42%
• simulation 4%
• static pressure 15%
• tubes 9%
• velocity measurement 78%
• wind tunnels 15%

Chemical Compounds

• Capacitor 26%
• Counter Electrode 28%
• Flow 50%
• Pressure 45%
• Simulation 16%