The properties of ZnO/Cu/ZnO multilayer films before and after annealing in the different atmosphere

D. R. Sahu, Jow Lay Huang

研究成果: Article同行評審

69 引文 斯高帕斯(Scopus)

摘要

ZnO/Cu/ZnO multilayers were prepared on glass substrates by simultaneous RF magnetron sputtering of ZnO and dc magnetron sputtering of Cu. The influence of post growth annealing on the structural, electrical and optical properties of the multilayer was investigated. The experimental results show that the properties of the multilayers are improved with post annealing in vacuum and deteoriated in air, nitrogen or oxygen atmospheres. X-ray diffraction measurement indicated that the multilayers are c-axis oriented similar to ZnO wurzite structure. The multilayers heat treated up to 200 °C under vacuum maintained a transmittance over 85% and sheet resistance about 9.46 Ω/sq which further increases with increase of the annealing temperature.

原文English
頁(從 - 到)208-211
頁數4
期刊Thin Solid Films
516
發行號2-4
DOIs
出版狀態Published - 2007 十二月 3

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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