The structural and optical properties of zinc oxide thin films deposited on PET substrate by r.f. magnetron sputtering

Yang Ming Lu, Shu Yi Tsai, Jeng Jong Lu, Min Hsiung Hon

研究成果: Conference contribution

1 引文 斯高帕斯(Scopus)

摘要

The transparent conducting films have been investigated extensively because of their excellent electrical and optical properties in many applications. For producing the LCD (Liquid Crystal Displays) and OLED (Organic Light-Emitting Diode), the transparent conductive films are mainly deposited on the glass. Using the plastic substrate has the advantages of low cost, light-weighted, and flexible characteristics; it is considered as the candidate substrate material for the portable and flexible LCD. The surface roughness measured by AFM was in the range 2.63-11.1 nm. The result shows that the crystallite size increases with increasing the r.f. power. The microstructure of ZnO film has a proud (002) orientation. The average transmittance of ZnO film can be obtained over 80% in the visible spectrum. The lowest resistivity obtained is 4.0×10-3 ohm-cm. The adhesion between ZnO films and PET substrate is good because there is no separate observed in this study.

原文English
主出版物標題Nanoscience and Technology
發行者Trans Tech Publications Ltd
頁面971-974
頁數4
版本PART 2
ISBN(列印)3908451302, 9783908451303
DOIs
出版狀態Published - 2007
事件China International Conference on Nanoscience and Technology, ChinaNANO 2005 - Beijing, China
持續時間: 2005 6月 92005 6月 11

出版系列

名字Solid State Phenomena
號碼PART 2
121-123
ISSN(列印)1012-0394

Other

OtherChina International Conference on Nanoscience and Technology, ChinaNANO 2005
國家/地區China
城市Beijing
期間05-06-0905-06-11

All Science Journal Classification (ASJC) codes

  • 原子與分子物理與光學
  • 材料科學(全部)
  • 凝聚態物理學

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