In this study, we report the one-dimension Li doped ZnO nanorods (NRs) on glass substrates with hydrothermal method, and the fabrication of Li doped ZnO NRs humidity sensors. It was found that the as-grown Li doped ZnO NRs were structurally evenly with a wurtzite structure. The relative humidity (RH) effect factor was found to be dependent on the ultraviolet (UV) illumination of humidity sensors with a nanostructure. During UV illumination, it was also found that photocurrent to dark current contrast ratios were approximately 17.6 and 14.5, when measured with RHs of 30 and 80%, respectively, at 5.0 V applied bias. The competitive surface effects of a great quantity oxygen/water to explain the observed variations in UV photodetector under different relative humidity conditions.
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