With technology rapidly advance, the energy of demand is also with the greatly increased. Therefore, the development of new energy or energy harvesting attracts much attention. Our group has proposed an innovated micro heat pipe harvester based on the micro-piezoelectric vibration-induced power device. The deformation of the piezoelectric material by vapors impacting enables it to convert the vapor momentum to the power. In this paper, the purpose is to enhance the output of the micro heat pipe generator by the optimization of the vibration-induced device. A suitable cantilever beam combined with piezoelectric material is designed by multiphysics and genetic algorithm. The optimal geometry is found to approach its natural frequency. The experimental results show that the power improves about 293.38%. Through this study, the micro heat pipe generator will be practiced and approach the available usage.