The tribological properties of Zr/a-C:Zr/Zr-C:H-x films with various pulsed-direct current power frequency sliding against various normal loading

W. H. Kao, Yean-Liang Su, J. H. Horng, S. H. Yao, H. C. Huang

研究成果: Article同行評審

1 引文 斯高帕斯(Scopus)

摘要

In this research, Zr/a-C:Zr/Zr-C:H-x films with various pulsed-direct current power frequency in the range of 30-110 kHz (x in the term Zr-C:H-x is the pulse frequencies in the deposition process) are deposited on AISI M2 substrates by a closed-field unbalanced magnetron sputtering system. The tribological properties of the films are investigated under rod-on-disc line contact wear modes using a reciprocating tribometer. The tribological behaviour of various wear pairs is discussed based on hardness (H), elastic modulus (E), adhesion property, initial Hertzian pressure and transformed layer on various contact surfaces of wear pairs. The experimental results display that the Zr-C:H-70 film with the maximum hardness and plastic deformation resistance (H3/E2) exhibits excellent tribological properties under line contact wear mode.

原文English
頁(從 - 到)S5337-S5342
期刊Materials Research Innovations
19
DOIs
出版狀態Published - 2015 五月 1

All Science Journal Classification (ASJC) codes

  • 材料科學(全部)
  • 凝聚態物理學
  • 材料力學
  • 機械工業

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