The use of a biomolecular target for crystalline carbon nitride film deposition by Ar ion-beam sputtering without any other source of nitrogen

L. C. Chen, T. R. Lu, C. T. Kuo, D. M. Bhusari, J. J. Wu, K. H. Chen, T. M. Chen

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34 引文 斯高帕斯(Scopus)

摘要

Carbon nitride films have been synthesized by argon ion-beam sputtering from a biomolecular compound target, 8-aza-6-aminopurine (C4N6H4). The compound has a six-membered ring structure similar to that existing in the hypothetical β-C3N4. Except for the target material, no other source of nitrogen was used during sputtering deposition. It was found that crystalline carbon nitride with high N/C atomic composition ratios of 0.43-0.56 can be formed even at room temperature. The infrared spectra of the film exhibit two peaks at 1383 and 1643cm-1, corresponding to C-N and CN stretching modes, respectively. No detectable peak at 2200cm-1 (CN stretching mode) is observed. Both x-ray diffraction and transmission electron microscopy show a very strong broad peak at 3.2 Å, comparable to the d spacing of the (110) orientation in the β-C3N4 structure. However, it is suggested that the film contains a nanocrystalline phase with a crystal structure yet to be determined.

原文English
頁(從 - 到)3449-3451
頁數3
期刊Applied Physics Letters
72
發行號26
DOIs
出版狀態Published - 1998 十二月 1

All Science Journal Classification (ASJC) codes

  • 物理與天文學(雜項)

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