The use of a multiple roughening scheme to enhance sensing performance of pH sensors with NiO nanosheets/multi-walled carbon nanotubes on KOH-etched Si substrates

Yi Shiang Chang, Shui Jinn Wang, Rong-Ming Ko, Wen Rui Hsu

研究成果: Article同行評審

摘要

Sensing electrodes (SEs) fabricated by a multiple surface roughening scheme based on KOH-etched Si substrates with spraying deposited multi-walled carbon nanotubes (MWCNTs) and hydrothermally grown (HTG) NiO nanosheets (NSs) to improve pH sensing performance are demonstrated. A surface area (SA) gain of around 2.31 is obtained from the etched Si substrate, which results in an enhancement in the pH sensitivity of MWCNTs SEs from 52.15 to 54.95 mV pH-1 based on Si substrates without and with KOH etching. Effects of the thermal annealing temperatures and spraying times of the MWCNTs and HTG times of NiO NSs of the proposed NiO NSs/MWCNTs/pyramid-Si SEs on pH sensitivity, hysteresis, and reliability are studied. A near-Nernstian response of 57.56 mV pH-1 is obtained, which could be attributed to the proposed method maximize SA and the number of ion adsorption sites for advancing pH sensing performance.

原文English
文章編號SBBG09
期刊Japanese Journal of Applied Physics
60
發行號SB
DOIs
出版狀態Published - 2021 五月

All Science Journal Classification (ASJC) codes

  • 工程 (全部)
  • 物理與天文學 (全部)

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