The use of a simulation, a hybrid Taguchi, and dual response surface methods in the automated material handling system tool-to-tool strategy for a 300-mm fab

Taho Yang, Yu An Shen, Chiwoon Cho, Yu Ru Lin

研究成果: Article同行評審

8 引文 斯高帕斯(Scopus)

摘要

With the increase in the size and weight of 300-mm wafers, manual handling has become difficult and automated material handling systems (AMHS) are necessary. The 300-mm fab requires only one type of vehicle and rail to connect all of the process resources, allowing vehicles to travel directly between intrabay and interbay systems. This type of transportation is a direct tool-to-tool transportation strategy. This paper aims to analyse the impact of direct tool-to-tool transportation. The present study used a discrete-event simulation to create a 300-mm semiconductor manufacturing flow and executed a factorial experiment of three factors based on uniform design, including the direct ratio, the stocker capacity and the number of machine load ports. Finally, using the dual-response surface method, the most important of the three factors and the best performance were determined. The results show promise for the proposed tool-to-tool transportation strategy in solving a practical application.

原文English
頁(從 - 到)281-300
頁數20
期刊European Journal of Industrial Engineering
6
發行號3
DOIs
出版狀態Published - 2012 五月

All Science Journal Classification (ASJC) codes

  • Industrial and Manufacturing Engineering

指紋 深入研究「The use of a simulation, a hybrid Taguchi, and dual response surface methods in the automated material handling system tool-to-tool strategy for a 300-mm fab」主題。共同形成了獨特的指紋。

引用此