Theoretical modeling and experimental verification on imprinting mechanism of laser assisted direct imprinting (LADI)

Yung Chun Lee, Jun Yi Ruan, Fei Bin Hsiao, Chun Ming Chen

研究成果: Conference contribution

摘要

This paper discusses the theoretical modeling of laser assisted direct imprinting (LADI) which utilizes a quartz mold, pulsed laser heating, and contact pressure for direct fabricating nanostructures on a silicon substrate. Based on pulsed laser heating, liquid film squeezing, and elastodynamic theories, a unified theory has successfully developed which not only quantitatively explains the fundamental mechanism of LADI but also can be used to predict correlations between the final imprinting depth and several important parameters including laser fluence, contact pressure, and feature size. To verify this theory, a series of LADI experiments have been carried out. Experimental results, in their general trends, are in agreement with the theoretical predictions and therefore supporting the validity of the modeling. Physical implications and potential applications of this modeling will be addressed.

原文English
主出版物標題3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008
發行者IEEE Computer Society
頁面418-421
頁數4
ISBN(列印)9781424419081
DOIs
出版狀態Published - 2008
事件3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008 - Sanya, China
持續時間: 2008 1月 62008 1月 9

出版系列

名字3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS

Other

Other3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008
國家/地區China
城市Sanya
期間08-01-0608-01-09

All Science Journal Classification (ASJC) codes

  • 控制與系統工程
  • 電氣與電子工程

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