Thickness and permittivity measurement in multi-layered dielectric structures using complementary split-ring resonators

Chieh Sen Lee, Chin Lung Yang

研究成果: Article同行評審

100 引文 斯高帕斯(Scopus)

摘要

This paper presents a non-invasive microwave method based on a square-shaped complementary split-ring resonator (CSRR) to measure the thickness and permittivity of multilayer dielectric structures. The CSRR sensor is etched on the ground plane of a microstrip line. The change of resonance frequency depends on the thickness and permittivity of the multilayer dielectric sample below the ground plane. For resolution analysis, the resonance frequency shifts caused by a variation of permittivity Δvarepsilon=0.01) and thickness Δ d=0.01~mm in the detection layer were compared across various design dimensions. Sensor size optimization improved the resolution in permittivity and thickness measurement by 66% and 37%, respectively. Subsequently, the permittivity and thickness resolution was improved by 28% and 16%, respectively, by optimizing the separation of the etched CSRRs. The analysis results show that a CSRR sensor can be designed with excellent resolution in core layer permittivity changes and thickness resolution in multilayered dielectric structures.

原文English
文章編號6636056
頁(從 - 到)695-700
頁數6
期刊IEEE Sensors Journal
14
發行號3
DOIs
出版狀態Published - 2014 三月 1

All Science Journal Classification (ASJC) codes

  • 儀器
  • 電氣與電子工程

指紋

深入研究「Thickness and permittivity measurement in multi-layered dielectric structures using complementary split-ring resonators」主題。共同形成了獨特的指紋。

引用此