Thickness Effect of Nb-Doped TiO2 Transparent Conductive Oxide Grown on Glass Substrates Fabricated by RF Sputtering

Zong Liang Tseng, Lung Chien Chen, Jian Fu Tang, Meng Fu Shih, Sheng Yuan Chu

研究成果: Article

9 引文 斯高帕斯(Scopus)

摘要

Transparent conducting Nb-doped titanium oxide (NTO) films were deposited on a non-alkali glass substrate using an RF magnetron sputtering method with post-annealing. Structural, electrical and optical properties of the NTO films were found to be strongly dependent on film thickness. A resistivity of 4.2 × 10−3 Ω cm and an average visible transmittance of ∼70% were obtained at the film thickness of 360 nm, indicating that the polycrystalline NTO fabricated by the sputtering method has sufficient potential as a transparent conducting oxide (TCO) candidate for practical applications.

原文English
頁(從 - 到)1476-1480
頁數5
期刊Journal of Electronic Materials
46
發行號3
DOIs
出版狀態Published - 2017 三月 1

    指紋

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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