Three-dimensional morphological instabilities in chemical vapor deposition films

Chi Chuan Hwang, Hwei Yen Yang, Jin Yuan Hsieh, Yuan Mon Dai

研究成果: Article同行評審

4 引文 斯高帕斯(Scopus)

摘要

In this article, an analysis of nonlinear three-dimensional (3-D) morphological instabilities in chemical vapor deposition (CVD) is presented. We establish a set of mathematically governing equation and boundary condition for the system of CVD and derive a weakly nonlinear evolution equation by considering a diffusion-limited growth condition to study the morphological instabilities in the CVD process. This evolution equation not only can predict the behaviors of interfacial growth of films, but can also be a basis of weakly nonlinear analysis. The analysis from critical condition is adopted to investigate the two-dimensional (2-D) band-like cells and the 3-D hexagonal structures.

原文English
頁(從 - 到)371-380
頁數10
期刊Thin Solid Films
304
發行號1-2
DOIs
出版狀態Published - 1997 七月

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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