Tribological analysis on powder slurry in chemical mechanical polishing

Yeau Ren Jeng, Hung Jung Tsai

研究成果: Article同行評審

17 引文 斯高帕斯(Scopus)

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深入研究「Tribological analysis on powder slurry in chemical mechanical polishing」主題。共同形成了獨特的指紋。

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds