Using the unbalanced magnetron sputtering method, ZrN thin films with addition of varying content of Ti, namely Zr-Ti-N, were obtained, and then were characterized and studied for wear resistance. As the Ti content increased, the hardness increased, reaching a maximum value 2483HK0.025 at 18.7 at.% Ti. However, the film with addition of 16.5 at.% Ti showed the best wear performance and the highest critical loads.
|頁（從 - 到）||413-416|
|出版狀態||Published - 2006 9月 1|
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