Tribological performance of ZrN ceramic thin films with Ti additions

Sun Hui Yao, Yan Liang Su, Wen Xian Gao, Kai Wen Cheng

研究成果: Article同行評審

摘要

Using the unbalanced magnetron sputtering method, ZrN thin films with addition of varying content of Ti, namely Zr-Ti-N, were obtained, and then were characterized and studied for wear resistance. As the Ti content increased, the hardness increased, reaching a maximum value 2483HK0.025 at 18.7 at.% Ti. However, the film with addition of 16.5 at.% Ti showed the best wear performance and the highest critical loads.

原文English
頁(從 - 到)413-416
頁數4
期刊Mocaxue Xuebao/Tribology
26
發行號5
出版狀態Published - 2006 9月 1

All Science Journal Classification (ASJC) codes

  • 材料力學
  • 機械工業
  • 表面、塗料和薄膜
  • 材料化學

指紋

深入研究「Tribological performance of ZrN ceramic thin films with Ti additions」主題。共同形成了獨特的指紋。

引用此