Tribological properties of Zr-C:H:Nx% coatings with different amounts of nitrogen addition

W. H. Kao, Y. L. Su, S. H. Yao, H. C. Huang

研究成果: Article同行評審

1 引文 斯高帕斯(Scopus)

摘要

A closed field unbalanced magnetron (CFUBM) sputtering system is used to deposit Zr-C:H:Nx% coatings with nitrogen contents ranging from 0 to 29 at.% on AISI M2 steel disks. The microstructures of the various coatings are analyzed using Raman spectrometry, while the hardness and adhesion strength are measured via nanoindentation tests and scratch tests, respectively. The tribological properties of the coatings are tested against AISI 52100 steel balls under loads of 0.5-10 N using a ball-on-disk wear tester. The wear testing results reveal that the Zr-C:H:N12% coating has excellent tribological properties, including a low wear depth, a low friction coefficient and an extended lifetime.

原文English
頁(從 - 到)842-848
頁數7
期刊Thin Solid Films
520
發行號2
DOIs
出版狀態Published - 2011 11月 1

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 表面和介面
  • 表面、塗料和薄膜
  • 金屬和合金
  • 材料化學

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