Tribology properties of IGZO films by the sliding contacts of reciprocating motion

Tse Chang Li, Ching Lin Hsiao, Yu Ching Chiang, Jen Fin Lin

研究成果: Conference contribution

摘要

In the present study, sliding tribo tests with reciprocating motion were carried out to simulate the thumb-driven wear arising in indium gallium zinc oxide (IGZO) specimens prepared at five inclination angles during film deposition. Frictional and normal forces, Fx and Fy, and vibrations were used to analyze energy dissipation (ΔW) and composite mean force fluctuation intensities (IFSS). Friction coefficient is lowered by decreasing the mean surface roughness (Ra); its increase can raise ΔW. The friction coefficients of samples prepared with a nonzero inclination angle were lower than that of the IGZO-0° specimen.

原文English
主出版物標題Engineering Tribology and Materials - ICETAT 2016
編輯Yunn Lin Hwang, Jeng Haur Horng
發行者Trans Tech Publications Ltd
頁面68-74
頁數7
ISBN(列印)9783035710762
DOIs
出版狀態Published - 2017
事件International Conference on Engineering Tribology and Applied Technology, ICETAT 2016 - Taipei, Taiwan
持續時間: 2016 十一月 42016 十一月 6

出版系列

名字Key Engineering Materials
739 KEM
ISSN(列印)1013-9826
ISSN(電子)1662-9795

Other

OtherInternational Conference on Engineering Tribology and Applied Technology, ICETAT 2016
國家/地區Taiwan
城市Taipei
期間16-11-0416-11-06

All Science Journal Classification (ASJC) codes

  • 材料科學(全部)
  • 材料力學
  • 機械工業

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