Tutorial on applying the VM technology for TFT-LCD manufacturing

Fan-Tien Cheng, Chi An Kao, Chun Fang Chen, Wen Huang Tsai

研究成果: Article

16 引文 (Scopus)

摘要

In the high-tech industries, on-line quality monitoring on each workpiece under processing is required to ensure process stability and improve yield rate. However, conducting workpiece-by-workpiece actual metrology is very expensive and time-consuming. In this case, a novel idea is to use "virtual metrology" (VM) that conjectures workpiece quality based on process data collected from production equipment with a slight supplement of actual metrology data. The purpose of this tutorial paper is to select the thin film transistor-liquid crystal display (TFT-LCD) manufacturing processes as the illustrative examples for demonstrating the methodology of fab-wide implementation of the VM technology systematically. To begin with, a survey of VM-related literature is performed. Then, the features of an effective and refined VM system are presented with the automatic VM (AVM) system developed by the authors as a case study, followed by introduction of the TFT-LCD production tools and manufacturing processes. After that, the generic deployment schemes of the VM technology for the TFT-LCD tools are proposed. Finally, illustrative examples with the AVM system as a case study are presented to show how the VM technology applies to TFT-LCD manufacturing.

原文English
文章編號6983605
頁(從 - 到)55-69
頁數15
期刊IEEE Transactions on Semiconductor Manufacturing
28
發行號1
DOIs
出版狀態Published - 2015 二月 1

指紋

Thin film transistors
Liquid crystal displays
metrology
transistors
manufacturing
liquid crystals
thin films
supplements
industries
methodology
conduction
Monitoring
Processing

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Industrial and Manufacturing Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

引用此文

Cheng, Fan-Tien ; Kao, Chi An ; Chen, Chun Fang ; Tsai, Wen Huang. / Tutorial on applying the VM technology for TFT-LCD manufacturing. 於: IEEE Transactions on Semiconductor Manufacturing. 2015 ; 卷 28, 編號 1. 頁 55-69.
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Tutorial on applying the VM technology for TFT-LCD manufacturing. / Cheng, Fan-Tien; Kao, Chi An; Chen, Chun Fang; Tsai, Wen Huang.

於: IEEE Transactions on Semiconductor Manufacturing, 卷 28, 編號 1, 6983605, 01.02.2015, p. 55-69.

研究成果: Article

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