Ultrasound assisted laser machining and surface cleaning

Chi Cheng Chiu, Chih Hao Chang, Yung-Chun Lee

研究成果: Conference contribution

4 引文 (Scopus)

摘要

This paper investigates a new approach of using ultrasound to assist material ablation efficiency in laser machining processes. Typical laser machining methods suffer a common problem that the laser-ablated material particles will fall back to the sample surface and therefore either deter subsequent laser machining process or result in material debris on sample surface. In this work we introduce high frequency mechanical vibration, or ultrasound, to the sample under laser machining. The oscillation of sample surface can eject laser-ablated particles and therefore achieve both purposes of surface cleaning and machining speed increasing. Preliminary experimental results have support the feasibility of the propose method which can effectively improve machining quality in most laser machining for a wide variety of materials.

原文English
主出版物標題2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
頁面872-875
頁數4
DOIs
出版狀態Published - 2010 十一月 29
事件5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 - Xiamen, China
持續時間: 2010 一月 202010 一月 23

出版系列

名字2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010

Other

Other5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
國家China
城市Xiamen
期間10-01-2010-01-23

指紋

Surface cleaning
Machining
Ultrasonics
Lasers
Ablation
Debris
Vibrations (mechanical)

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

引用此文

Chiu, C. C., Chang, C. H., & Lee, Y-C. (2010). Ultrasound assisted laser machining and surface cleaning. 於 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 (頁 872-875). [5592155] (2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010). https://doi.org/10.1109/NEMS.2010.5592155
Chiu, Chi Cheng ; Chang, Chih Hao ; Lee, Yung-Chun. / Ultrasound assisted laser machining and surface cleaning. 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010. 2010. 頁 872-875 (2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010).
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abstract = "This paper investigates a new approach of using ultrasound to assist material ablation efficiency in laser machining processes. Typical laser machining methods suffer a common problem that the laser-ablated material particles will fall back to the sample surface and therefore either deter subsequent laser machining process or result in material debris on sample surface. In this work we introduce high frequency mechanical vibration, or ultrasound, to the sample under laser machining. The oscillation of sample surface can eject laser-ablated particles and therefore achieve both purposes of surface cleaning and machining speed increasing. Preliminary experimental results have support the feasibility of the propose method which can effectively improve machining quality in most laser machining for a wide variety of materials.",
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Chiu, CC, Chang, CH & Lee, Y-C 2010, Ultrasound assisted laser machining and surface cleaning. 於 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010., 5592155, 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, 頁 872-875, 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, 10-01-20. https://doi.org/10.1109/NEMS.2010.5592155

Ultrasound assisted laser machining and surface cleaning. / Chiu, Chi Cheng; Chang, Chih Hao; Lee, Yung-Chun.

2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010. 2010. p. 872-875 5592155 (2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010).

研究成果: Conference contribution

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AB - This paper investigates a new approach of using ultrasound to assist material ablation efficiency in laser machining processes. Typical laser machining methods suffer a common problem that the laser-ablated material particles will fall back to the sample surface and therefore either deter subsequent laser machining process or result in material debris on sample surface. In this work we introduce high frequency mechanical vibration, or ultrasound, to the sample under laser machining. The oscillation of sample surface can eject laser-ablated particles and therefore achieve both purposes of surface cleaning and machining speed increasing. Preliminary experimental results have support the feasibility of the propose method which can effectively improve machining quality in most laser machining for a wide variety of materials.

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Chiu CC, Chang CH, Lee Y-C. Ultrasound assisted laser machining and surface cleaning. 於 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010. 2010. p. 872-875. 5592155. (2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010). https://doi.org/10.1109/NEMS.2010.5592155