Ultraviolet Beam Lithography System for Digital Fabrication of Roller Molds

Shan Yang, Yung Chun Lee

研究成果: Article同行評審

摘要

This article presents a digital ultraviolet (UV) beam lithography system for fabricating microstructures of arbitrary patterns on a roller mold. This roller mold can then be used in roller imprinting for fast and large-area replication of microstructures on substrates. This digital optomechanical system consists of a UV light source, a digital micromirror device (DMD) and its electronic controller, a high-precision image lens, a fiber array integrated with microlenses on both ends, and a two-axis (x-θ) servo-controlled motion stage. It exposes a photoresist (PR) layer coated on the cylindrical surface of a roller with a linear array of 192 small UV spots focused by a microlens/fiber array. On the other end of the fibers, UV light is fed by DMD's micromirrors so that the UV light can be dynamically modulated. Finally, by synchronizing the electronics of DMD chip and the mechanical movement (rotation and translation) of the roller, one can achieve arbitrary UV patterning on the roller's PR layer in a digital and maskless manner. This system can successfully achieve UV patterning with a smallest linewidth of 8 μm, a pattern resolution of 2.5 μm, and a total patterning width of 192 mm on a roller with a diameter of 100 mm.

原文English
文章編號9145867
頁(從 - 到)226-234
頁數9
期刊IEEE/ASME Transactions on Mechatronics
26
發行號1
DOIs
出版狀態Published - 2021 二月

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Computer Science Applications
  • Electrical and Electronic Engineering

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