TY - JOUR
T1 - Unified fabrication process for complex gratings
AU - Ho, Chi Chun
AU - Chen, Jung San
AU - Lin, Chia Heng
AU - Lee, Yung Chun
AU - Chen, Yu Bin
N1 - Funding Information:
The authors much appreciated financial support from the Ministry of Science and Technology (MOST) in Taiwan under Grant Nos. MOST 103-2221-E-006-032, MOST 103-2923-E-006-008-MY2, MOST-104-2628-E-006-008-MY2, and MOST-105-3113-E-006-002.
PY - 2016/7/1
Y1 - 2016/7/1
N2 - A unified fabrication process was developed for four complex gratings. One period of each grating contains multiple pairs of ridges/grooves, and a ridge is usually composed of diversified materials. The process was suitable not only for mass fabrication but also for a large area. Moreover, with only one mold, four gratings could be obtained at once. Two 12×12 mm2 samples were fabricated for demonstration. Profile uniformity of each sample was confirmed with broadband infrared (2.5 to 25 μm) transmittance spectra. A good agreement between measured and modeling results was observed.
AB - A unified fabrication process was developed for four complex gratings. One period of each grating contains multiple pairs of ridges/grooves, and a ridge is usually composed of diversified materials. The process was suitable not only for mass fabrication but also for a large area. Moreover, with only one mold, four gratings could be obtained at once. Two 12×12 mm2 samples were fabricated for demonstration. Profile uniformity of each sample was confirmed with broadband infrared (2.5 to 25 μm) transmittance spectra. A good agreement between measured and modeling results was observed.
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U2 - 10.1117/1.JMM.15.3.034502
DO - 10.1117/1.JMM.15.3.034502
M3 - Article
AN - SCOPUS:84979642531
SN - 1932-5150
VL - 15
JO - Journal of Micro/ Nanolithography, MEMS, and MOEMS
JF - Journal of Micro/ Nanolithography, MEMS, and MOEMS
IS - 3
M1 - 034502
ER -