Using a TiO2/ZnO double-layer film for improving the sensing performance of ZnO based NO gas sensor

Chia Yu Lin, Jiang Ging Chen, Wei Yi Feng, Chii Wann Lin, Ju Wen Huang, James J. Tunney, Kuo Chuan Ho

研究成果: Article同行評審

40 引文 斯高帕斯(Scopus)


NO gas sensors, based on ZnO thin film (ZnOfilm), TiO 2 nanoparticulate film (TiO2NP), and TiO 2NP/ZnOfilm double-layer film, were fabricated, and their sensing characteristics towards NO gas were investigated in this study. The maximal response of a ZnOfilm deposited onto a rougher Al 2O3 substrate, towards NO gas, was higher than that of a ZnOfilm deposited on a smoother glass substrate. Although the sensing response of the TiO2NPs itself towards NO gas was minute, the TiO2NP/ZnOfilm double-layer film showed enhanced response as compared with TiO2NP or ZnOfilm single-layer film. In addition, the sensor response of the TiO2NP/ZnOfilm double-layer film was strongly influenced by the annealing time for the film preparation; the maximum response to NO was enhanced about 6.2 times as the annealing time was increased from 30 min to 2 h. Based on the XPS results, the increase in the transition zone between TiO2NP and ZnOfilm along with the appearance of Ti3+ state was noticed when the annealing time was increased. With the high sensitive TiO2NP/ZnO film/Al2O3 electrode, the limit of detection (S/N = 3) can be achieved at 8.8 ppb. The double-layer TiO2NP/ ZnOfilm also showed improved selectivities with respect to NO 2 and CO.

頁(從 - 到)361-367
期刊Sensors and Actuators, B: Chemical
出版狀態Published - 2011 10月 20

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 儀器
  • 凝聚態物理學
  • 表面、塗料和薄膜
  • 金屬和合金
  • 電氣與電子工程
  • 材料化學


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