Using co-sputtered ZrSiOx gate dielectrics to improve mobility and subthreshold swing of amorphous IGZO thin-film transistors

Chien Hsiung Hung, Shui Jinn Wang, Pang Yi Liu, Chien Hung Wu, Nai Sheng Wu, Hao Ping Yan, Tseng Hsing Lin

研究成果: Conference contribution

指紋 深入研究「Using co-sputtered ZrSiO<sub>x</sub> gate dielectrics to improve mobility and subthreshold swing of amorphous IGZO thin-film transistors」主題。共同形成了獨特的指紋。

Engineering & Materials Science