This study developed a novel transdermal delivery chip system for delivering silver sulfadiazine into rat skin. The chip system was used Micro-Electro-Mechanical-Systems (MEMS) technology to fabricate and electroporation as experimental mechanism. The electrode would generate cell-penetrating electric field in the skin between electrodes when the voltage was applied. Microscope raman spectrometer was used to analyze spectral strength of drug which indicates the drug delivery effect. An excellent transdermal delivery could be obtained and the silver sulfadiazine could be delivered to 200 μ m deep in the rat skin when the voltage at 30 V and the frequency at 0.01 Hz were used. Therefore, this chip system could enhance effectively the transdermal delivery and delivery depth.