Using digital image correlation on SEM images of strain field after ion beam milling for the residual stress measurement of thin films

Terry Yuan Fang Chen, Yun Chia Chou, Zhao Ying Wang, Wen Yen Lin, Ming Tzer Lin

研究成果: Article同行評審

2 引文 斯高帕斯(Scopus)

摘要

The residual stress of thin films during the deposition process can cause the components to have unpredictable deformation and damage, which could affect the service life and reliability of the microsystems. Developing an accurate and reliable method for measuring the residual stress of thin films at the micrometer and nanometer scale is a great challenge. To analyze the residual stress regarding factors such as the mechanical anisotropy and preferred orientation of the materials, information related to the in-depth lattice strain function is required when calculating the depth profiles of the residual strain. For depth-resolved measurements of residual stress, it is strategically advantageous to develop a measurement procedure that is microstructurally independent. Here, by performing an incremental focused ion beam (FIB) ring-core drilling experiment with various depth steps, the digital image correlation (DIC) of the specimen images was obtained. The feasibility of DIC to FIB images was evaluated after the translation test, and an appropriate procedure for reliable results was established. Furthermore, the condition of the film in the function of residual stress was assessed and compared to elucidate the applicability of this technology.

原文English
文章編號1291
期刊Materials
13
發行號6
DOIs
出版狀態Published - 2020 三月 1

All Science Journal Classification (ASJC) codes

  • 材料科學(全部)

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