Using KrF ELA to Improve Gate-Stacked LaAlO3/ZrO2 IGZO-TFTs with Novel AP-PECVD Technique

Chien Hung Wu, Kow-Ming Chang, Yu Xin Zhang, Yi-Ming Chen, Shui-Jinn Wang

研究成果: Conference contribution

原文	English
主出版物標題	The 14th International Conference on Nano Science and Nano Technology
出版地	Mokpo, Korea
出版狀態	Published - 2016 11月 10

引用此

@inproceedings{3de007c619304e53b7fa2805b535794d,

title = "Using KrF ELA to Improve Gate-Stacked LaAlO3/ZrO2 IGZO-TFTs with Novel AP-PECVD Technique",

author = "Wu, {Chien Hung} and Kow-Ming Chang and Zhang, {Yu Xin} and Yi-Ming Chen and Shui-Jinn Wang",

year = "2016",

month = nov,

day = "10",

language = "English",

booktitle = "The 14th International Conference on Nano Science and Nano Technology",

}