Using KrF ELA to Improve Gate-Stacked LaAlO3/ZrO2 IGZO-TFTs with Novel AP-PECVD Technique

Chien Hung Wu, Kow-Ming Chang, Yu Xin Zhang, Yi-Ming Chen, Shui-Jinn Wang

研究成果: Conference contribution

原文English
主出版物標題The 14th International Conference on Nano Science and Nano Technology
出版地Mokpo, Korea
出版狀態Published - 2016 十一月 10

引用此

Wu, C. H., Chang, K-M., Zhang, Y. X., Chen, Y-M., & Wang, S-J. (2016). Using KrF ELA to Improve Gate-Stacked LaAlO3/ZrO2 IGZO-TFTs with Novel AP-PECVD Technique. 於 The 14th International Conference on Nano Science and Nano Technology