Very Low Vt [Ir-Hf]/HfLaO CMOS Using Novel Self-Aligned Low Temperature Shallow Junctions

Shui-Jinn Wang, C.- F. Cheng, C. H. Wu, N. C. Su, S. P. McAlister, A. Chin

研究成果: Conference contribution

原文English
主出版物標題International Electron Devices Meeting (IEDM) Tech. Dig.
出版狀態Published - 2007 十二月

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