Vibration control on single axis flexible piezoelectric positioning stage by PID controller

Yun Hui Liu, Ching Ming Chao, Chin Tu Lu, Kuo-Shen Chen

研究成果: Conference contribution

2 引文 斯高帕斯(Scopus)

摘要

The objective of this study is to suppress the relative displacement between lens set and granite platform using a micro flexible positioning mechanism, installed between lens set and gantry, with active vibration control. The relative displacement between lens set and granite platform was measured by a sensor and was then sent to a controller as input. If there is any horizontally relative displacement, the controller will send an output signal to a piezoelectric actuator in the positioning mechanism to cancel out the relative displacement. In the current study, a PID controller was applied to control the single axis mechanism. The displacement signal was detected by a laser displacement transducer for the feedback control. In addition, a mathematical model is set up for the piezoelectric micro positioning stage to simulate the performance of the PID controller under step inputs. Output displacement responses of the flexible positioning stage are observed by varying the proportional, integral, derivative parameters of the controller. The goal of this study is to suppress the horizontally relative displacement of 15 ∼ 20μm(peak value) between the lens set and granite platform under a frequency range of 0 ∼ 10 Hz. Through simulations and experiments of dynamic tracking, it was verified that the vibration of stage is effectively decreased to 2 ∼ 3μm after control under the proposed frequency range.

原文English
主出版物標題Advances in Environmental Vibration - Proceedings of the 5th International Symposium on Environmental Vibration, ISEV 2011
編輯Hirokazu Takemiya, G. De Roeck, Wanming Zhai, E. Tutumluer
發行者Science Press
頁面883-889
頁數7
ISBN(電子)9787030323736
出版狀態Published - 2011 一月 1
事件5th International Symposium on Environmental Vibration, ISEV 2011 - Chengdu, China
持續時間: 2011 十月 202011 十月 22

出版系列

名字Advances in Environmental Vibration - Proceedings of the 5th International Symposium on Environmental Vibration, ISEV 2011

Other

Other5th International Symposium on Environmental Vibration, ISEV 2011
國家China
城市Chengdu
期間11-10-2011-10-22

All Science Journal Classification (ASJC) codes

  • Mechanics of Materials
  • Visual Arts and Performing Arts
  • Environmental Engineering
  • Management, Monitoring, Policy and Law

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  • 引用此

    Liu, Y. H., Chao, C. M., Lu, C. T., & Chen, K-S. (2011). Vibration control on single axis flexible piezoelectric positioning stage by PID controller. 於 H. Takemiya, G. De Roeck, W. Zhai, & E. Tutumluer (編輯), Advances in Environmental Vibration - Proceedings of the 5th International Symposium on Environmental Vibration, ISEV 2011 (頁 883-889). (Advances in Environmental Vibration - Proceedings of the 5th International Symposium on Environmental Vibration, ISEV 2011). Science Press.