TY - JOUR
T1 - Vibration Mode Suppression in Micromechanical Resonators Using Embedded Anti- Resonating Structures
AU - Liu, Jia Ren
AU - Tsai, Chun Pu
AU - Du, Wun Ruei
AU - Chen, Ting Yi
AU - Chen, Jung San
AU - Li, Wei Chang
N1 - Funding Information:
The chip fabrication was supported by the Taiwan Semiconductor Research Institute (TSRI) and Taiwan Semiconductor Manufacturing Company (TSMC), Hsinchu, Taiwan. The authors would like to thank the staff of the NEMS Research Center, National Taiwan University, for providing technical support.
Funding Information:
Manuscript received August 4, 2020; revised December 8, 2020; accepted December 15, 2020. Date of publication January 1, 2021; date of current version January 15, 2021. This work was supported in part by the Ministry of Science and Technology of Taiwan under Grant MOST-108-2221-E-002-150 and in part by the Team of Excellence Research Program of National Taiwan University (NTU) under Grant NTU-CC-109L890708. Subject Editor C. Nguyen. (Corresponding author: Wei-Chang Li.) Jia-Ren Liu and Wun-Ruei Du were with the Institute of Applied Mechanics, National Taiwan University, Taipei 10617, Taiwan. They are now with Global Unichip Corporation (GUC), Hsinchu 30078, Taiwan, and also with Taiwan Semiconductor Manufacturing Company (TSMC) Ltd., Hsinchu 30078, Taiwan (e-mail: [email protected]; [email protected]).
Publisher Copyright:
© 1992-2012 IEEE.
PY - 2021/2
Y1 - 2021/2
N2 - This paper presents a technique for suppressing specific resonance modes of micromechanical resonators by mechanical means. In particular, attaching multiple miniaturized beam structures with properly designed dimensions acting as anti-resonating tuned mass dampers (TMD's) to a micromechanical clamped-clamped beam (CC-beam) resonator based on a CMOS-MEMS process platform successfully attenuate the dynamic frequency response of the fundamental mode while retaining the 2nd harmonic mode of the CC-beam. The measured results show that the frequency transmission response of the TMD-embedded CC beam drops as much as ∼ 12 dB compared to that of a reference resonator. An analytical model is used to study the effects of the parameter variations of the TMD structures. This technique provides an alternative approach to mechanically suppressing vibration modes for the micromechanical resonators that cannot employ the conventional quarter-wavelength support technique. [2020-0289].
AB - This paper presents a technique for suppressing specific resonance modes of micromechanical resonators by mechanical means. In particular, attaching multiple miniaturized beam structures with properly designed dimensions acting as anti-resonating tuned mass dampers (TMD's) to a micromechanical clamped-clamped beam (CC-beam) resonator based on a CMOS-MEMS process platform successfully attenuate the dynamic frequency response of the fundamental mode while retaining the 2nd harmonic mode of the CC-beam. The measured results show that the frequency transmission response of the TMD-embedded CC beam drops as much as ∼ 12 dB compared to that of a reference resonator. An analytical model is used to study the effects of the parameter variations of the TMD structures. This technique provides an alternative approach to mechanically suppressing vibration modes for the micromechanical resonators that cannot employ the conventional quarter-wavelength support technique. [2020-0289].
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U2 - 10.1109/JMEMS.2020.3046374
DO - 10.1109/JMEMS.2020.3046374
M3 - Article
AN - SCOPUS:85099112755
SN - 1057-7157
VL - 30
SP - 53
EP - 63
JO - Journal of Microelectromechanical Systems
JF - Journal of Microelectromechanical Systems
IS - 1
M1 - 9312171
ER -