VM-based baseline predictive maintenance scheme

Yao Sheng Hsieh, Fan Tien Cheng, Hsien Cheng Huang, Chung Ren Wang, Saint Chi Wang, Haw Ching Yang

研究成果: Article

12 引文 (Scopus)

摘要

Most conventional FDC approaches are used to find the TDs required for monitoring and the TDs' related key parameters that need to be monitored, and then apply the SPC approach to detect the faults. However, in a practical situation, an abnormal key-parameter value may not be caused solely by its own TD; it may result from the other related parameters. Therefore, accurate fault classification or diagnosis may not be achieved. Moreover, most conventional PdM methods require a library of degradation patterns from previous run-to-failure data sets. Without those massive historical failure data, the PdM methods may not function properly. In this paper, we propose a virtual-metrology-(VM) based BPM scheme that possesses the capabilities of FDC and PdM. The BPM scheme contains the TD baseline model, FDC logic, and a RUL predictive module. The TD baseline model generated by the VM technique is applied to serve as the reference for detecting the fault. By applying the BPM scheme, fault diagnosis and prognosis can be accomplished, the problem of the conventional SPC method mentioned above can be resolved, and the requirement of massive historical failure data can also be released.

原文English
文章編號6304937
頁(從 - 到)132-144
頁數13
期刊IEEE Transactions on Semiconductor Manufacturing
26
發行號1
DOIs
出版狀態Published - 2013 二月 11

指紋

maintenance
Failure analysis
prognosis
Degradation
metrology
logic
Monitoring
modules
degradation
requirements

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

引用此文

Hsieh, Yao Sheng ; Cheng, Fan Tien ; Huang, Hsien Cheng ; Wang, Chung Ren ; Wang, Saint Chi ; Yang, Haw Ching. / VM-based baseline predictive maintenance scheme. 於: IEEE Transactions on Semiconductor Manufacturing. 2013 ; 卷 26, 編號 1. 頁 132-144.
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VM-based baseline predictive maintenance scheme. / Hsieh, Yao Sheng; Cheng, Fan Tien; Huang, Hsien Cheng; Wang, Chung Ren; Wang, Saint Chi; Yang, Haw Ching.

於: IEEE Transactions on Semiconductor Manufacturing, 卷 26, 編號 1, 6304937, 11.02.2013, p. 132-144.

研究成果: Article

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