WO3 nanoparticle with MEMS technology improve the sensing response by HWCVD system

Chih Hung Lin; Shoou Jinn Chang; Ting Jen Hsueh

doi:10.1109/NEMS.2017.8017003

WO₃ nanoparticle with MEMS technology improve the sensing response by HWCVD system

Chih Hung Lin, Shoou Jinn Chang, Ting Jen Hsueh

微電子工程研究所

研究成果: Conference contribution

1 引文斯高帕斯（Scopus）

摘要

In this work, a simple and cost effective MEMS based gas sensor incorporating with WO₃ nanoparticle is presented of the measurement nitric oxide on ppb level. The WO₃ NPs synthesis, it was deposited on Pt/Ni/SiN_x/SiO₂/Silicon substrate by HWCVD with thermal furnace annealing process. The sample characterized was using SEM, XRD, EDS; The electrical measurements for transient resistance by keithley 2400 source meter. The good sensing response is optimum at temperature 150, and then optimum sensor exhibited remarkably high response from lower nitric oxide concentration were ∼10.34%, 19.7% and 29.06% for 50, 150 and 250 ppb, respectively.

原文	English
主出版物標題	2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017
發行者	Institute of Electrical and Electronics Engineers Inc.
頁面	190-193
頁數	4
ISBN（電子）	9781509030590
DOIs	https://doi.org/10.1109/NEMS.2017.8017003
出版狀態	Published - 2017 8月 25
事件	12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 - Los Angeles, United States 持續時間: 2017 4月 9 → 2017 4月 12

出版系列

名字	2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017

Other

Other	12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017
國家/地區	United States
城市	Los Angeles
期間	17-04-09 → 17-04-12

All Science Journal Classification (ASJC) codes

電氣與電子工程
機械工業
電子、光磁材料
儀器

存取文件

10.1109/NEMS.2017.8017003

其它文件與鏈接

引用此

Lin, C. H., Chang, S. J., & Hsueh, T. J. (2017). WO₃ nanoparticle with MEMS technology improve the sensing response by HWCVD system. 於 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 (頁 190-193). 文章 8017003 (2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NEMS.2017.8017003

Lin, Chih Hung ; Chang, Shoou Jinn ; Hsueh, Ting Jen. / WO₃ nanoparticle with MEMS technology improve the sensing response by HWCVD system. 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. 頁 190-193 (2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017).

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title = "WO3 nanoparticle with MEMS technology improve the sensing response by HWCVD system",

abstract = "In this work, a simple and cost effective MEMS based gas sensor incorporating with WO3 nanoparticle is presented of the measurement nitric oxide on ppb level. The WO3 NPs synthesis, it was deposited on Pt/Ni/SiNx/SiO2/Silicon substrate by HWCVD with thermal furnace annealing process. The sample characterized was using SEM, XRD, EDS; The electrical measurements for transient resistance by keithley 2400 source meter. The good sensing response is optimum at temperature 150, and then optimum sensor exhibited remarkably high response from lower nitric oxide concentration were ∼10.34%, 19.7% and 29.06% for 50, 150 and 250 ppb, respectively.",

author = "Lin, {Chih Hung} and Chang, {Shoou Jinn} and Hsueh, {Ting Jen}",

note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 ; Conference date: 09-04-2017 Through 12-04-2017",

year = "2017",

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doi = "10.1109/NEMS.2017.8017003",

language = "English",

series = "2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017",

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Lin, CH, Chang, SJ & Hsueh, TJ 2017, WO₃ nanoparticle with MEMS technology improve the sensing response by HWCVD system. 於 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017., 8017003, 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Institute of Electrical and Electronics Engineers Inc., 頁 190-193, 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Los Angeles, United States, 17-04-09. https://doi.org/10.1109/NEMS.2017.8017003

WO₃ nanoparticle with MEMS technology improve the sensing response by HWCVD system. / Lin, Chih Hung; Chang, Shoou Jinn; Hsueh, Ting Jen.
2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 190-193 8017003 (2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017).

研究成果: Conference contribution

TY - GEN

T1 - WO3 nanoparticle with MEMS technology improve the sensing response by HWCVD system

AU - Lin, Chih Hung

AU - Chang, Shoou Jinn

AU - Hsueh, Ting Jen

PY - 2017/8/25

Y1 - 2017/8/25

N2 - In this work, a simple and cost effective MEMS based gas sensor incorporating with WO3 nanoparticle is presented of the measurement nitric oxide on ppb level. The WO3 NPs synthesis, it was deposited on Pt/Ni/SiNx/SiO2/Silicon substrate by HWCVD with thermal furnace annealing process. The sample characterized was using SEM, XRD, EDS; The electrical measurements for transient resistance by keithley 2400 source meter. The good sensing response is optimum at temperature 150, and then optimum sensor exhibited remarkably high response from lower nitric oxide concentration were ∼10.34%, 19.7% and 29.06% for 50, 150 and 250 ppb, respectively.

AB - In this work, a simple and cost effective MEMS based gas sensor incorporating with WO3 nanoparticle is presented of the measurement nitric oxide on ppb level. The WO3 NPs synthesis, it was deposited on Pt/Ni/SiNx/SiO2/Silicon substrate by HWCVD with thermal furnace annealing process. The sample characterized was using SEM, XRD, EDS; The electrical measurements for transient resistance by keithley 2400 source meter. The good sensing response is optimum at temperature 150, and then optimum sensor exhibited remarkably high response from lower nitric oxide concentration were ∼10.34%, 19.7% and 29.06% for 50, 150 and 250 ppb, respectively.

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M3 - Conference contribution

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T3 - 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017

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BT - 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017

PB - Institute of Electrical and Electronics Engineers Inc.

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Lin CH, Chang SJ, Hsueh TJ. WO₃ nanoparticle with MEMS technology improve the sensing response by HWCVD system. 於 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017. Institute of Electrical and Electronics Engineers Inc. 2017. p. 190-193. 8017003. (2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017). doi: 10.1109/NEMS.2017.8017003