WO3 nanoparticle with MEMS technology improve the sensing response by HWCVD system

Chih Hung Lin, Shoou Jinn Chang, Ting Jen Hsueh

研究成果: Conference contribution

摘要

In this work, a simple and cost effective MEMS based gas sensor incorporating with WO3 nanoparticle is presented of the measurement nitric oxide on ppb level. The WO3 NPs synthesis, it was deposited on Pt/Ni/SiNx/SiO2/Silicon substrate by HWCVD with thermal furnace annealing process. The sample characterized was using SEM, XRD, EDS; The electrical measurements for transient resistance by keithley 2400 source meter. The good sensing response is optimum at temperature 150, and then optimum sensor exhibited remarkably high response from lower nitric oxide concentration were ∼10.34%, 19.7% and 29.06% for 50, 150 and 250 ppb, respectively.

原文English
主出版物標題2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017
發行者Institute of Electrical and Electronics Engineers Inc.
頁面190-193
頁數4
ISBN(電子)9781509030590
DOIs
出版狀態Published - 2017 八月 25
事件12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 - Los Angeles, United States
持續時間: 2017 四月 92017 四月 12

出版系列

名字2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017

Other

Other12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017
國家United States
城市Los Angeles
期間17-04-0917-04-12

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Electronic, Optical and Magnetic Materials
  • Instrumentation

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