X-ray photoelectron spectroscopy energy band alignment of spin-on CoTiO3 high- k dielectric prepared by sol-gel spin coating method

Kuo Hsing Kao, Shiow Huey Chuang, Woei Cherng Wu, Tien Sheng Chao, Jian Hao Chen, Ming Wen Ma, Reui Hong Gao, Michael Y. Chiang

研究成果: Article同行評審

3 引文 斯高帕斯(Scopus)

摘要

The characteristics of CoTiO3 high- k dielectric prepared by sol-gel spin coating method had been demonstrated. High electrical permittivity (k∼40.2) of CoTiO3 dielectric was extracted via the transmission electron microscopy image and capacitance-voltage curves. In addition, the valence band offset between thermal SiO2 and spin-on CoTiO3 was about 4.0 eV, which was detected by x-ray photoelectron spectroscopy. The band gaps of thermal SiO2 and spin-on CoTiO3 were 9.0 and 2.2 eV, respectively. Energy band alignment of spin-on CoTiO3 directly with SiO2 and indirectly with Si was determined in this work.

原文English
文章編號092907
期刊Applied Physics Letters
93
發行號9
DOIs
出版狀態Published - 2008

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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