ZnO nanostructures prepared on LiAlO2 substrates by chemical vapor deposition

Y. T. Tu, C. H. Chen, C. Y.J. Lu, T. H. Huang, T. Yan, J. J. Wu, M. M.C. Chou, L. Chang

研究成果: Conference contribution

摘要

A two-step process of chemical vapor deposition for growing ZnO nanostructures on γ -LiAlO2 (100) substrate was proposed. By taking advantage of the dual orientation characteristic of the substrate, scattered islands with a { 101 0} azimuth orientation were first grown at 650 °C to serve as a mask followed by a second-step process at relatively low temperatures of 450-500 °C to grow {0001} oriented nanostructures. Two examples were given in this paper. Nanorods of 50-200 nm in size were prepared at a high growing pressure of 2.7x104 Pa, and nanocones were obtained at 6.7x103 Pa. The density of the nanostructures can be controlled by the growing time of the first-step process. Both nanostructures were free from threading dislocations and showed good luminescence characteristics.

原文English
主出版物標題Thermal and Plasma CVD of Nanostructures and Their Applications
發行者Electrochemical Society Inc.
頁面13-19
頁數7
版本31
ISBN(列印)9781623320546
DOIs
出版狀態Published - 2013
事件Symposium on Thermal and Plasma CVD of Nanostructures and Their Applications - 221st ECS Meeting - Seattle, WA, United States
持續時間: 2012 五月 62012 五月 10

出版系列

名字ECS Transactions
號碼31
45
ISSN(列印)1938-5862
ISSN(電子)1938-6737

Other

OtherSymposium on Thermal and Plasma CVD of Nanostructures and Their Applications - 221st ECS Meeting
國家United States
城市Seattle, WA
期間12-05-0612-05-10

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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